中文

Chinese Journal of Nature ›› 2019, Vol. 41 ›› Issue (2): 100-110.doi: 10.3969/j.issn.0253-9608.2019.02.003

• Progress • Previous Articles     Next Articles

Coessential-joint growth technology of large size single crystal diamond

SHU Guoyang①②, RALCHENKO V.①②, BOLSHAKOV A.①②, LIU Kang①, SUN Mingqi①, YAO Kaili①, ZHAO Jiwen①, GAO Ge①, LIU Benjian①, WANG Weihua①, LI Yicun①, LIU Xuedong①, DAI Bing①, ZHU Jiaqi①   

  1. ①National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150001, China; ②General Physics Institute of Russian Academy of Science, Moscow 119991, Russia
  • Online:2019-04-25 Published:2019-04-22

PDF

3287

Abstract:

The technical approach and status of development of synthetic single-crystal diamond (SCD) were introduced with the comparison of several different chemical vapor deposition (CVD) diamond techniques on their advantages and disadvantages.Coessential-joint growth technology, an effective method for breaking through the dimensional limitation and realizing the large size SCD, was focused on Microwave Plasma CVD (MPCVD). Inch sized SCD wafer was achieved. The discussion and analysis were presented on the scientific issues such as lateral growth, interface quality and evolution, as well as the control of 3D structure
connecting process. In addition, the prospects in the field of advanced applications were forecasted.