Research on measurement technology of ultra-precision planar optics
ZHOU Yonghao①, CHANG Lin②, HE Tingting①, YU Yingjie①
①Department of Precision Mechanical Engineering, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China; ②School of Engineering, Huzhou University, Huzhou 313000, Zhejiang Province, China
ZHOU Yonghao, CHANG Lin, HE Tingting, YU Yingjie. Research on measurement technology of ultra-precision planar optics[J]. Chinese Journal of Nature, 2023, 45(3): 157-176.