Abstract: Vacuum metrology plays an indispensable role in advanced manufacturing and scientific research. Compared with traditional metrological methods, cold atom vacuum metrology exhibits unique advantages, including a lower measurement limit and calibration stability without drift. In this paper, we realized the preparation of on-chip cold atoms based on a self-designed grating-chip and investigated the loading and dissipation processes of this compact chip-based cold atom system. Furthermore, the background vacuum of the system was measured. The experimental results demonstrate that this compact grating-chip cold atom vacuum metrology system meets the relevant requirements for vacuum measurement, achieving a measurement result of up to 3.2×10^-9 Pa. This work provides an important scientific tool for the future miniaturization and commercialization of cold atom vacuum metrology.