Prospect of a New Structure SiC MESFETs Fabricated by Ion-Implantation
WANG Shou-guo①③,ZHANG Yan②
①Associate Professor, ②Professor, Department of Electronic and Information Engineering, Shenzhen Graduate School,Harbin Institute of Technology,Shenzhen 518055,China; ③School of Information Science and Technology, Northwest University, Xi’an 710127, China