Abstract: Micro/nanorobots can be defined as tiny robots with typical dimensions at the micro/nanoscales (several nanometers to hundreds of micrometers), which can convert magnetic, light, ultrasound or other forms of energy into their mechanical motion. The potential capabilities of localized diagnosis and treatment with higher precision and efficiency make the micro/nanorobots a
promising tool for a variety of biomedical applications. This article reviews recent research progress in preparation, driving of the
micro/nanorobots, with a special focus on their preliminary applications for directed drug delivery in vivo. In addition, we discuss the challenges of in vivo applications and future trends.