Chinese Journal of Nature ›› 2011, Vol. 33 ›› Issue (4): 211-215.doi: 10.3969/j.issn.0253-9608.2011.04.006

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Prospect of a New Structure SiC MESFETs Fabricated by Ion-Implantation

WANG Shou-guo①③,ZHANG Yan   

  1. ①Associate Professor, ②Professor, Department of Electronic and Information Engineering, Shenzhen Graduate School,Harbin Institute of Technology,Shenzhen 518055,China; ③School of Information Science and Technology, Northwest University, Xi’an 710127, China
  • Received:2010-10-21 Revised:2010-11-21 Online:2011-08-20 Published:2011-08-25