自然杂志 ›› 2019, Vol. 41 ›› Issue (2): 100-110.doi: 10.3969/j.issn.0253-9608.2019.02.003

• 科技进展 • 上一篇    下一篇

大尺寸单晶金刚石同质连接技术

舒国阳①②，Ralchenko V.①②，Bolshakov A.①②，刘康①，孙明琪①，姚凯丽①，赵继文①，高鸽①，刘本建①，王伟华①，李一村①，刘雪冬①，代兵①，朱嘉琦①   

  1. ①哈尔滨工业大学 特种环境复合材料技术国家级重点实验室，哈尔滨 150001；②俄罗斯科学院普通物理研究所，俄罗斯 莫斯科 119991
  • 出版日期:2019-04-25 发布日期:2019-04-22
  • 作者简介:代兵：通信作者，研究方向：金刚石材料及器件、极端环境晶体材料。 朱嘉琦：通信作者，国家杰出青年科学基金获得者，研究方向：光电晶体及薄膜等。

Coessential-joint growth technology of large size single crystal diamond

SHU Guoyang①②, RALCHENKO V.①②, BOLSHAKOV A.①②, LIU Kang①, SUN Mingqi①, YAO Kaili①, ZHAO Jiwen①, GAO Ge①, LIU Benjian①, WANG Weihua①, LI Yicun①, LIU Xuedong①, DAI Bing①, ZHU Jiaqi①   

  1. ①National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150001, China; ②General Physics Institute of Russian Academy of Science, Moscow 119991, Russia
  • Online:2019-04-25 Published:2019-04-22

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摘要：

介绍了制备人造单晶金刚石的技术途径及发展现状，重点讨论并对比了几种化学气相沉积法(CVD)金刚石制备技术的优缺点，详细阐述了基于微波等离子体CVD (MPCVD)法的同质连接技术——一种突破晶体尺寸限制，实现大尺寸单晶金刚石的有效途径。通过该技术实现了英寸级单晶金刚石晶片的制备，并针对横向生长、界面质量及演化、三维结构连接控制等核心科学技术问题进行了分析和讨论，展望了其在尖端应用领域的发展前景。

关键词: 人造金刚石, 单晶, 微波等离子体化学气相沉积, 同质连接

Abstract:

The technical approach and status of development of synthetic single-crystal diamond (SCD) were introduced with the comparison of several different chemical vapor deposition (CVD) diamond techniques on their advantages and disadvantages.Coessential-joint growth technology, an effective method for breaking through the dimensional limitation and realizing the large size SCD, was focused on Microwave Plasma CVD (MPCVD). Inch sized SCD wafer was achieved. The discussion and analysis were presented on the scientific issues such as lateral growth, interface quality and evolution, as well as the control of 3D structure
connecting process. In addition, the prospects in the field of advanced applications were forecasted.

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