关键词: 超精密平面光学元件, 光学干涉测量, 波长移相, 相位解调

Abstract: Ultra-precision optics are the core components that determine the performance of high-end equipment and are widely used in advanced fields such as large scientific devices and precision apparatus. High-precision measurement of optical components is an important way to ensure component quality. Optical measurement technology is effective for optical component inspection because
of its non-destructive and high accuracy. First, this paper provided an overview of the main measurement technologies for ultraprecision optics, focusing on the technology principles, current research status and application bottlenecks. Secondly, for the phase demodulation problem in optical measurement technology, the wavelength shifting interferometry is used as an example. The principle and implementation process of the phase demodulation algorithm are outlined in connection with the measurement technology of ultra-precision planar optics. The principle and implementation process of the phase demodulation algorithm are outlined, and the performance of the phase demodulation algorithm is comprehensively evaluated. Finally, the future development trend of optical component measurement technology is foreseen.