原子力显微镜(AFM)是具有纳米级精度的检测设备，同时可应用于纳米结构的加工。AFM纳米加工已经成为微纳结构加工的有效方法之一，可广泛地应用于机械、物理、化学和生物医学等领域。文章首先简要介绍传统微纳加工方法，并对基于AFM的纳米机械加工方法进行详细介绍并分析了其相对优势；然后介绍了AFM加工得到的纳米沟槽和纳米点阵等结构在纳流控及拉曼检测等领域的应用，并对其未来的发展方向进行展望。综述展示了AFM纳米机械加工的应用潜力，为相关领域的研究提供了一种简单、可行的纳米加工方法。

Atomic force microscope (AFM) is a detection device with nano-level precision, which can be utilized to fabricate nanostructures. It has been one of the effective approaches to machine nanostructures and widely used in fields of mechanical engineering, physics, chemistry and biomedicine. Traditional micro/nanofabrication methods were introduced briefly at first. Subsequently, the nanofabrication method based on AFM was described in details and the corresponding advantages were analyzed. The applications of the nanostructures that machined using AFM such as nanochannel and nanodot in fields of nanofluidic and Raman detection were presented. The prospects for future research were put forward at the end of this paper. This review demonstrates the application potential of AFM nanofabrication and provides a necessary nanomachining approach for the research in related fields.