真空计量在尖端制造业和前沿科学研究中具有不可或缺的作用。与传统计量手段相比，冷原子真空计量具备更低的计量下限和不偏移的校准稳定性等独特优势。本文通过自主设计的光栅芯片实现芯片冷原子的制备，研究了该紧凑型芯片冷原子系统的装载和耗散过程，并测量了系统的背景真空。实验结果表明，该紧凑型光栅芯片冷原子真空计量系统可满足真空计量的相关要求，真空测量结果可达3.2×10^-9 Pa。这项工作为未来冷原子真空计量的便携化、商用化提供重要参考。

Vacuum metrology plays an indispensable role in advanced manufacturing and scientific research. Compared with traditional metrological methods, cold atom vacuum metrology exhibits unique advantages, including a lower measurement limit and calibration stability without drift. In this paper, we realized the preparation of on-chip cold atoms based on a self-designed grating-chip and investigated the loading and dissipation processes of this compact chip-based cold atom system. Furthermore, the background vacuum of the system was measured. The experimental results demonstrate that this compact grating-chip cold atom vacuum metrology system meets the relevant requirements for vacuum measurement, achieving a measurement result of up to 3.2×10^-9 Pa. This work provides an important scientific tool for the future miniaturization and commercialization of cold atom vacuum metrology.