超精密光学元件是决定高端装备性能的核心元件，在大科学装置、精密仪器等领域中被广泛应用。对光学元件进行高精度检测是保证元件质量的重要途径。光学检测技术因具有非破坏性、高精度而成为光学元件检测的有效技术。首先，对超精密光学元件主要检测技术进行了综述，重点介绍技术原理、研究现状和应用瓶颈；其次，针对光学检测技术中的相位解调问题，以波长移相测量技术为例，结合超精密平面光学元件检测，概述了相位解调算法的原理与实现过程，并对其性能进行综合评估；最后，展望光学元件检测技术的未来发展趋势。

Ultra-precision optics are the core components that determine the performance of high-end equipment and are widely used in advanced fields such as large scientific devices and precision apparatus. High-precision measurement of optical components is an important way to ensure component quality. Optical measurement technology is effective for optical component inspection because
of its non-destructive and high accuracy. First, this paper provided an overview of the main measurement technologies for ultraprecision optics, focusing on the technology principles, current research status and application bottlenecks. Secondly, for the phase demodulation problem in optical measurement technology, the wavelength shifting interferometry is used as an example. The principle and implementation process of the phase demodulation algorithm are outlined in connection with the measurement technology of ultra-precision planar optics. The principle and implementation process of the phase demodulation algorithm are outlined, and the performance of the phase demodulation algorithm is comprehensively evaluated. Finally, the future development trend of optical component measurement technology is foreseen.