大尺寸单晶金刚石同质连接技术

舒国阳，Ralchenko V.，Bolshakov A.，刘康，孙明琪，姚凯丽，赵继文，高鸽，刘本建，王伟华，李一村，刘雪冬，代兵，朱嘉琦

doi:10.3969/j.issn.0253-9608.2019.02.003

自然杂志 >

2019 , Vol. 41 >Issue 2: 100 - 110

DOI: https://doi.org/10.3969/j.issn.0253-9608.2019.02.003

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大尺寸单晶金刚石同质连接技术

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①哈尔滨工业大学特种环境复合材料技术国家级重点实验室，哈尔滨 150001；②俄罗斯科学院普通物理研究所，俄罗斯莫斯科 119991

代兵：通信作者，研究方向：金刚石材料及器件、极端环境晶体材料。朱嘉琦：通信作者，国家杰出青年科学基金获得者，研究方向：光电晶体及薄膜等。

网络出版日期: 2019-04-22

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Coessential-joint growth technology of large size single crystal diamond

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①National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150001, China; ②General Physics Institute of Russian Academy of Science, Moscow 119991, Russia

Online published: 2019-04-22

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摘要

介绍了制备人造单晶金刚石的技术途径及发展现状，重点讨论并对比了几种化学气相沉积法(CVD)金刚石制备技术的优缺点，详细阐述了基于微波等离子体CVD (MPCVD)法的同质连接技术——一种突破晶体尺寸限制，实现大尺寸单晶金刚石的有效途径。通过该技术实现了英寸级单晶金刚石晶片的制备，并针对横向生长、界面质量及演化、三维结构连接控制等核心科学技术问题进行了分析和讨论，展望了其在尖端应用领域的发展前景。

关键词： 人造金刚石; 单晶; 微波等离子体化学气相沉积; 同质连接

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舒国阳，Ralchenko V.，Bolshakov A.，刘康，孙明琪，姚凯丽，赵继文，高鸽，刘本建，王伟华，李一村，刘雪冬，代兵，朱嘉琦 . 大尺寸单晶金刚石同质连接技术[J]. 自然杂志, 2019 , 41(2) : 100 -110 . DOI: 10.3969/j.issn.0253-9608.2019.02.003

Abstract

The technical approach and status of development of synthetic single-crystal diamond (SCD) were introduced with the comparison of several different chemical vapor deposition (CVD) diamond techniques on their advantages and disadvantages.Coessential-joint growth technology, an effective method for breaking through the dimensional limitation and realizing the large size SCD, was focused on Microwave Plasma CVD (MPCVD). Inch sized SCD wafer was achieved. The discussion and analysis were presented on the scientific issues such as lateral growth, interface quality and evolution, as well as the control of 3D structure
connecting process. In addition, the prospects in the field of advanced applications were forecasted.

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